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About General Process MEMS
General MEMS Technology Laboratory attached to the Micro and Nano Science and Technology Research Institute of Shanghai Jiaotong University, by seven full-time members and one part-time professor, respectively, from microelectronics, chemical, materials, mechanical, optical engineering and other disciplines, including 3 professors2, associate professor, a senior engineer, two lecturers. The lab is the development of non-silicon material three-dimensional micro-machining technology research and information MEMS devices involving LIGA / Quasi-LIGA processing technology, UV-LIGA technique, electrochemical micro-machining technology, thin film electronic materials preparation microfabrication technology, the RF MEMS devices, Optical-MEMS devices, MEMS relay, MEMS sensors in many fields....
Copyright: 2012 General process MEMS Lab. Technical Support:Shanghai Yi Chao